@article{Gusev2024development,
author={Gusev, P.E.},
title={DEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICON},
conference={MODELING INFORMATION SYSTEMS AND TECHNOLOGIES},
publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov},
year={2024},
pages={538-546},
}