@article{Plotnikova2024one-dimensional,
author={Plotnikova, E.Y. and Vinokurov, A.A. and Arsent'ev, A.V.},
title={ONE-DIMENSIONAL DISTRIBUTION OF IMPURITY IN SILICON AND GERMANY WITH ION IMPLANTATION ACCORDING TO THE LINKHARD-SCHARF-SCHIOTTE MODEL},
conference={MODELING INFORMATION SYSTEMS AND TECHNOLOGIES},
publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov},
year={2024},
pages={566-572},
}