TY  CONF
TI  ONE-DIMENSIONAL DISTRIBUTION OF IMPURITY IN SILICON AND GERMANY WITH ION IMPLANTATION ACCORDING TO THE LINKHARD-SCHARF-SCHIOTTE MODEL
KW  ion implantation
KW  modeling
KW  p-n junction
KW  impurity concentration distribution
JO  MODELING INFORMATION SYSTEMS AND TECHNOLOGIES
AU  Plotnikova, E.Y.
AU  Vinokurov, A.A.
AU  Arsent'ev, A.V.
PY  2024
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov