@article{Shatskikh2025basics,
author={Shatskikh, M.A. and Makarov, C.D.},
title={BASICS OF SEMICONDUCTOR TECHNOLOGIES},
conference={CHALLENGING ISSUES IN SYSTEMS MODELING AND PROCESSES},
publisher={FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov},
year={2025},
pages={737-740},
}