%0 Conference Article
%T BASICS OF SEMICONDUCTOR TECHNOLOGIES
%A Shatskikh, M.A.
%A Makarov, C.D.
%K Semiconductor, chip manufacturing, microprocessor
%J CHALLENGING ISSUES IN SYSTEMS MODELING AND PROCESSES
%D 2025
%P 3
%I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov