TY  CONF
TI  BASICS OF SEMICONDUCTOR TECHNOLOGIES
KW  Semiconductor
KW  chip manufacturing
KW  microprocessor
JO  CHALLENGING ISSUES IN SYSTEMS MODELING AND PROCESSES
AU  Shatskikh, M.A.
AU  Makarov, C.D.
PY  2025
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov