%0 Conference Article
%T DEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICON
%A Gusev, P.E.
%K Bosch process, TSV
%J MODELING INFORMATION SYSTEMS AND TECHNOLOGIES
%D 2024
%P 8
%I FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov