TY  CONF
TI  DEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICON
KW  Bosch process
KW  TSV
JO  MODELING INFORMATION SYSTEMS AND TECHNOLOGIES
AU  Gusev, P.E.
PY  2024
PB  FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov