LDR 00595naa#a2200157#i#450#
001     EN\\bibl\12394
005     20241224162302.2
100 ## _a20240917b2024####ek#y0engy0150####ca
102 ## _aRU
200 1# _aDEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICON
       _eConference article/thesis
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2024
215 ## _a8 с.
608 ## _aConference article/thesis
       _2local
675 ## _aТравление. 621.794.4
       _z
700 #1 _aGusev
       _gP. E.
856 4# _abibl.vgltu.ru
       _u