{"leader":"00595naa#a2200157#i#450#","fields":[{"001":"EN\\\\bibl\\12394"},{"005":"20241127115836.3"},{"100":{"ind1":"#","ind2":"#","subfields":[{"a":"20240917b2024####ek#y0engy0150####ca"}]}},{"102":{"ind1":"#","ind2":"#","subfields":[{"a":"RU"}]}},{"200":{"ind1":"1","ind2":"#","subfields":[{"a":"DEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICON"},{"e":"Conference article\/thesis"}]}},{"210":{"ind1":"1","ind2":"#","subfields":[{"a":"Voronezh"},{"c":"FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov"},{"d":"2024"}]}},{"215":{"ind1":"#","ind2":"#","subfields":[{"a":"8 \u00d1\u0081."}]}},{"608":{"ind1":"#","ind2":"#","subfields":[{"a":"Conference article\/thesis"},{"2":"local"}]}},{"675":{"ind1":"#","ind2":"#","subfields":[{"a":"\u00d0\u00a2\u00d1\u0080\u00d0\u00b0\u00d0\u00b2\u00d0\u00bb\u00d0\u00b5\u00d0\u00bd\u00d0\u00b8\u00d0\u00b5. 621.794.4"},{"z":""}]}},{"700":{"ind1":"#","ind2":"1","subfields":[{"a":"Gusev"},{"g":"P. E."}]}},{"856":{"ind1":"4","ind2":"#","subfields":[{"a":"bibl.vgltu.ru"},{"u":""}]}}]}