00595naa#a2200157#i#4500001001500000005001700015100004100032102000700073200010400080210013700184215001000321608003700331675003400368700001700402856001800419EN\\bibl\1239420241113033602.3##a20240917b2024####ek#y0engy0150####ca##aRU1#aDEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICONeConference article/thesis1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2024##a8 с.##aConference article/thesis2local##aТравление. 621.794.4#1aGusevgP. E.4#abibl.vgltu.ru