00595naa#a2200157#i#450# EN\\bibl\12394 20241113034429.3 20240917b2024####ek#y0engy0150####ca RU DEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICON Conference article/thesis Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2024 8 с. Conference article/thesis local Травление. 621.794.4 Gusev P. E. bibl.vgltu.ru