LDR 00939naa#a2200181#i#450#
001     EN\\bibl\12398
005     20241127105333.3
100 ## _a20240917b2024####ek#y0engy0150####ca
102 ## _aRU
200 1# _aONE-DIMENSIONAL DISTRIBUTION OF IMPURITY IN SILICON AND GERMANY WITH ION IMPLANTATION ACCORDING TO THE LINKHARD-SCHARF-SCHIOTTE MODEL
       _eConference article/thesis
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2024
215 ## _a6 с.
608 ## _aConference article/thesis
       _2local
675 ## _aЭлектроника. Фотоэлектроника. Электронные лампы, трубки. Рентгенотехника. Ускорители частиц. 621.38
       _aМатериалы. Материаловедение. 620.22
       _z
700 #1 _aPlotnikova
       _gE. Yu.
700 #1 _aVinokurov
       _gA. A.
700 #1 _aArsent'ev
       _gA. V.
856 4# _abibl.vgltu.ru
       _u