00939naa#a2200181#i#4500001001500000005001700015100004100032102000700073200016500080210013700245215001000382608003700392675024500429700002300674700002100697700002100718856001800739EN\\bibl\1239820241127104941.3##a20240917b2024####ek#y0engy0150####ca##aRU1#aONE-DIMENSIONAL DISTRIBUTION OF IMPURITY IN SILICON AND GERMANY WITH ION IMPLANTATION ACCORDING TO THE LINKHARD-SCHARF-SCHIOTTE MODELeConference article/thesis1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2024##a6 с.##aConference article/thesis2local##aЭлектроника. Фотоэлектроника. Электронные лампы, трубки. Рентгенотехника. Ускорители частиц. 621.38aМатериалы. Материаловедение. 620.22#1aPlotnikovagE. Yu.#1aVinokurovgA. A.#1aArsent'evgA. V.4#abibl.vgltu.ru