00939naa#a2200181#i#450# EN\\bibl\12398 20241127103716.3 20240917b2024####ek#y0engy0150####ca RU ONE-DIMENSIONAL DISTRIBUTION OF IMPURITY IN SILICON AND GERMANY WITH ION IMPLANTATION ACCORDING TO THE LINKHARD-SCHARF-SCHIOTTE MODEL Conference article/thesis Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2024 6 с. Conference article/thesis local Электроника. Фотоэлектроника. Электронные лампы, трубки. Рентгенотехника. Ускорители частиц. 621.38 Материалы. Материаловедение. 620.22 Plotnikova E. Yu. Vinokurov A. A. Arsent'ev A. V. bibl.vgltu.ru