00686naa#a2200169#i#4500001001500000005001700015100004100032102000700073200008500080210013700165215001000302608003700312675010900349700002100458700001900479856001800498EN\\bibl\1576320250419174240.6##a20250414b2025####ek#y0engy0150####ca##aRU1#aRUSSIA'S MICROELECTRONICS PROCESS LAGS BEHIND THE USAeConference article/thesis1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2025##a6 с.##aConference article/thesis2local##aПрикладные информационные (компьютерные) технологии. 004.9#1aKonyakovagA. S.#1aNechaevgA. S.4#abibl.vgltu.ru