00669naa#a2200169#i#4500001001500000005001700015100004100032102000700073200006800080210013700148215001000285608003700295675010900332700002100441700001900462856001800481EN\\bibl\1580320250420112715.7##a20250414b2025####ek#y0engy0150####ca##aRU1#aBASICS OF SEMICONDUCTOR TECHNOLOGIESeConference article/thesis1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2025##a3 с.##aConference article/thesis2local##aПрикладные информационные (компьютерные) технологии. 004.9#1aShatskikhgM. A.#1aMakarovgC. D.4#abibl.vgltu.ru