00669naa#a2200169#i#450# EN\\bibl\15803 20250420143604.7 20250414b2025####ek#y0engy0150####ca RU BASICS OF SEMICONDUCTOR TECHNOLOGIES Conference article/thesis Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2025 3 с. Conference article/thesis local Прикладные информационные (компьютерные) технологии. 004.9 Shatskikh M. A. Makarov C. D. bibl.vgltu.ru