LDR 00726naa#a2200181#i#450#
001     EN\\bibl\16824
005     20250901004140.1
100 ## _a20250825b2025####ek#y0engy0150####ca
102 ## _aRU
200 1# _aON METHODS OF FORMING CONTACTS ON SiO2/Si SYSTEMS WITH ION TRACKS FILLED WITH Ni AND Cu NANOCLUSTERS
       _eConference article/thesis
210 1# _aVoronezh
       _cFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov
       _d2025
215 ## _a5 с.
608 ## _aConference article/thesis
       _2local
675 ## _aПленки. Тонкие пленки. 539.216.2
       _z
700 #1 _aBelozertsev
       _gYu. V.
700 #1 _aOmorokov
       _gD. B.
700 #1 _aEvsikova
       _gNatalya Yur'evna
856 4# _abibl.vgltu.ru
       _u