00827naa#a2200181#i#450# EN\\bibl\20306 20260701221704.3 20260630b2026####ek#y0engy0150####ca RU DEVELOPMENT OF AN AUTOMATED SYSTEM FOR QUALITY CONTROL OF MICROCIRCUITS ON A PRODUCTION LINE Conference article/thesis Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2026 9 с. Conference article/thesis local Электронные элементы, использующие свойства твердого тела. Полупроводниковая электроника. 621.382 Koval A. A. Avilova O. A. Getmantsev D. D. bibl.vgltu.ru