00691naa#a2200157#i#4500001011100000005001700111100004100128102000700169200010400176210013700280215001000417608003700427675003400464700001700498856001800515EN\VORONEZHSKIY GOSUDARSTVENNYY LESOTEHNICHESKIY UNIVERSITET IMENI G.F. MOROZOVA\bibl\6a84bdda94fbba14f78794c320260819084451.3##a20240917b2024####ek#y0engy0150####ca##aRU1#aDEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICONeConference article/thesis1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2024##a8 с.##aConference article/thesis2local##aТравление. 621.794.4#1aGusevgP. E.4#abibl.vgltu.ru