00691naa#a2200157#i#450# EN\VORONEZHSKIY GOSUDARSTVENNYY LESOTEHNICHESKIY UNIVERSITET IMENI G.F. MOROZOVA\bibl\6a84bdda94fbba14f78794c3 20260819084418.3 20240917b2024####ek#y0engy0150####ca RU DEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICON Conference article/thesis Voronezh FSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozov 2024 8 с. Conference article/thesis local Травление. 621.794.4 Gusev P. E. bibl.vgltu.ru